Cash waqf has emerged as an innovation within the Islamic economic system, aimed at supporting social and economic development, particularly in Muslim-majority countries. However, the implementation and research on cash waqf still face various challenges. The researcher chose this topic because cash waqf, as a relatively new Sharia-compliant financial instrument, holds significant potential in supporting social and economic development. Although there appears to be an increasing interest in cash waqf research, the trends in the development of this research topic remain unclear, especially in terms of the current state of the literature. This study aims to provide a comprehensive overview of global research trends on cash waqf and analyze its relationships with other relevant keywords. The research method employed is bibliometric analysis with a qualitative approach. The data were collected from two primary sources: Google Scholar and Scopus-indexed journal, with the use of Publish or Perish for data retrieval and VOSviewer for visualization and analysis of keyword relationships. This study did not impose any restrictions on the number or publication year during the data selection process. This study selected 224 relevant publications from a total of 626 studies for classification in Microsoft Excel. The analysis reveals that Indonesia is the most active country in cash waqf research, with peak productivity in 2022, accounting for 35 publications. The publication type is predominantly journal articles, with qualitative approaches being the most frequently used methodology. Discussion surrounding CWLS, waqf management, and productive waqf still present substantial opportunities for exploration, given the limited in-depth research in these areas. This study provides a theoretical contribution to the development of cash waqf research using a bibliometric approach. The research findings indicate that topics such as share waqf, Islamic economic development, waqf fund, productive waqf, waqf management, nāẓir, wāqif, and Law No. 41 of 2004 are less favored. The findings of this study can serve as a reference for future researchers by identifying underexplored research topics in cash waqf. Therefore, this research not only contributes to the mapping of the literature on cash waqf but also provides strategic guidance for the future development and implementation of cash waqf.